Carl Zeiss SMT introduced a new family member of AURIGA CrossBeam (FIB-SEM) workstations featuring a large 6 inch stage vacuum chamber and a total of 23 free accessory ports. The new AURIGA 60 platform essentially broadens the application spectrum of the well established ZEISS CrossBeam technology. Its vacuum chamber is large enough to handle wafers of up to 6 inch diameter, at the same time, the huge chamber offers the capability to attach up to 23 analytical or other attachments for diverse chemical or physical experiments.
